JPH039782Y2 - - Google Patents

Info

Publication number
JPH039782Y2
JPH039782Y2 JP1984146967U JP14696784U JPH039782Y2 JP H039782 Y2 JPH039782 Y2 JP H039782Y2 JP 1984146967 U JP1984146967 U JP 1984146967U JP 14696784 U JP14696784 U JP 14696784U JP H039782 Y2 JPH039782 Y2 JP H039782Y2
Authority
JP
Japan
Prior art keywords
filter
partition
clean room
partition wall
separator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1984146967U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6161011U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984146967U priority Critical patent/JPH039782Y2/ja
Publication of JPS6161011U publication Critical patent/JPS6161011U/ja
Application granted granted Critical
Publication of JPH039782Y2 publication Critical patent/JPH039782Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Filtering Of Dispersed Particles In Gases (AREA)
JP1984146967U 1984-09-27 1984-09-27 Expired JPH039782Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984146967U JPH039782Y2 (en]) 1984-09-27 1984-09-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984146967U JPH039782Y2 (en]) 1984-09-27 1984-09-27

Publications (2)

Publication Number Publication Date
JPS6161011U JPS6161011U (en]) 1986-04-24
JPH039782Y2 true JPH039782Y2 (en]) 1991-03-12

Family

ID=30705205

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984146967U Expired JPH039782Y2 (en]) 1984-09-27 1984-09-27

Country Status (1)

Country Link
JP (1) JPH039782Y2 (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0437614Y2 (en]) * 1987-08-11 1992-09-03

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6012582Y2 (ja) * 1981-09-21 1985-04-23 日本ケンブリツジ・フイルタ−株式会社 エアカ−テン付フイルタ−

Also Published As

Publication number Publication date
JPS6161011U (en]) 1986-04-24

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